Purification principle is: the feed gas first through a catalytic reactor, by the efficient removal of catalytic oxidant hydrogen, carbon monoxide, methane (hydrocarbons) and other impurities, and then through the deaerator by the deoxidizer oxygen, final traces of water adsorbed by the adsorber, CO to obtain high-quality high-purity gases. The gas purity required to achieve> 99.999%, the active metal alloy is used for the purification of gas absorption specially residual nitrogen impurities get ultra high purity gas. Equipment performance indicators 1, gas processing: 1-3NM3 / hr 2, the raw gas: liquid argon 99.99% O2 <5ppm dew point <-45 ℃ H20 <1ppm CO2, CO <2ppm 3, gas quality after purification: O2 <1ppm H2 <1PPm CO <1ppm CO2 <1ppm dew point <-76 ℃ dust <100 4 operating pressure: 0.8Mpa 5, operating temperature: temperature: 280-320 ℃ drying temperature: 300-320 ℃ 6, power consumption: 3.0KW (reactor 1.5 kilowatts long-term use of renewable dried using a dryer only) 7, cooling water: water temperature about 15 ℃, water consumption 0.2T / hr 8, Dimensions: width × depth × height (mm) 750 × 650 × 1550